This paper describes development of end milling of carbon steel by electrolyzed reduced water of dilute sodium chloride solution, instead of conventional cutting with cutting fluid which is not environmentally consciousness. First, experimental equipments were built with a machining center, cutting fluid supply system made from the bath pump, temperature sensor and temperature recorder etc., and end milling processing of carbon steel was performed using electrolyzed reduced water of dilute sodium chloride solution and conventional cutting fluid respectively. Next, measured surface roughness, evaluated surface deterioration layer, temperature change of work piece and wear state of end milling. As the results of all evaluations above-mentioned, there is no difference between the end milling process using electrolyzed reduced water and that of conventional using cutting fluid. It is supposed electrolyzed reduced water instead of cutting fluid is environmentally consciousness process.

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This paper describe precision polishing of the silicon wafer using dilute NaCl electrolytically reduced water, instead of conventional polishing with slurry which is environmental load increase and cost overrun. First, by the comparative experiment about the etching operation of electrolytically reduced water, NaOH solution and pure water to the surface of silicon wafer, it clarified the etching performance of electrolytically reduced water. Next, it experimented in the polish about the wafer which has oxide film (SiO₂) and the wafer which removed oxide film (SiO₂) by HF. It clarified the polishing characteristic of silicon wafer when using electrolytically reduced water by the experimental results. Moreover, when using electrolytically reduced water as polish solution, it clarified relation between the removal rate and polishing condition of the silicon wafer. It proved that electrolytically reduced water didn't have a bad influence on the polish pad last. By the result of this research, it proved that dilute NaCl electrolytically reduced water had an enough performance as the polishing solution of the silicon wafer.

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At the solder ball mounting process on the CSP (chip size package) package, must have inspection of excess solder on the inhaling tool. This study is how to detect excess solder during inhaling tool moving when using laser through-beam sensor. First, in order to remove the influence of the sensor output value by the normal solder ball and to extract only the sensor output value by the excess solder ball, the gobo was attached to the inhaling tool and the effect was checked. Next, create a slit on the laser receiver that increasing sensitivity of laser through-beam sensor and confirmed the improvement. The slit is created to increase sensor output value that compares result of excess solder on the inhaling tool with or without excess solder ball. Furthermore, we supposition production line study the inhaling tool movement error. Therefore then inhaling tool movement error is occur then measure sensor output value. Then we attempt to use difference value. It turns out that the detection method developed by this research can apply to manufacture line, because the excess solder ball of φ 0.30 mm, φ 0.25 mm and φ.0.18 mm can be detected certainly, without being influenced of the movement error of inhaling tool.

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The corrosion behavior of carbon steel in electrolyzed alkaline water, such as sodium chloride, sodium sulfate, sodium carbonate and ammonium carbonate, was investigated. As a result of that, in electrolyzed alkaline water of sodium chloride, local corrosion was occurred in the orifice area of the carbon steel. The same phenomenon was observed in the electrolyzed alkaline water of sodium sulfate. But in the electrolyzed alkaline water of sodium carbonate and ammonium carbonate, no corrosion was generated. To clarify the corrosion behavior of carbon steel in electrolyzed alkaline water, the pH and redox potential were measured, then the corrosion potential (natural electrode potential) was measured and the anticorrosion behavior of electrolyzed alkaline water was considered. The reasons why no corrosion was generated on the carbon steel immersed in alkaline water of sodium carbonate and ammonium carbonate were assumed to be that, since there were no corrosive ions present, significant alkalization of the solution and negativation of the redox potential occurred, and the immersed carbon steel was in a state of immunity or passivation.

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This paper describes the elucidation about influence of dilute NaCl electrolyzed water on character of Al-Mg alloy cutting surface. First, the immersing experiment was conducted for cutting sample of Al-Mg alloy A5056B on the electrolyzed reduced water and electrolyzed oxidized water of 0.10wt% NaCl. Next, checked whether discoloration had occurred on sample surface, and analyzed the element distribution and chemical bond state on cutting surface by ASE (Auger Electron Spectroscopy) and ESCA (Electron Spectroscopy for Chemical Analysis). As results of the study, following could be identified. (1) Dilute NaCl electrolyzed water can be applied to processes, such as machining and surface treatment of Al-Mg alloy. (2) The element distribution of the Al-Mg alloy on cutting surface is controllable by dilute NaCl electrolyzed water. (3) The chemical bond state of aluminum element on Al-Mg alloy cutting surface is controllable by dilute NaCl electrolyzed water.

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シリコンウエハーの洗浄工程において様々な化学洗浄薬液を使用しており,これらの洗浄薬液は環境および人体に悪影響を与えている.本研究は化学洗浄薬液の替りに,電解水がウエハー洗浄工程への応用について検討を行った.希薄NaCl電解水は洗浄薬液と同様な微粒子除去能力,および洗浄薬液よりも高いイオン残さ除去能力を持っており,シリコンウエハー超精密洗浄への応用が可能である.

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本研究は,電解還元水によるチタン合金の切削加工法の開発について述べる.まず,電解還元水および切削油剤を用いて,チタン合金の試料についてエンドミル加工を行った.つぎに,加工面のミクロ的な形状と表面あらさを測定し,加工面の表面層における清浄度と化学組成について分析を行った.また,切削温度および工具摩耗についても評価を行った.電解還元水は,切削溶液としてチタン合金の切削加工に十分に応用できる結果を得た.

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This paper describes the influence of electrolyzed reducing water of dilute NaCl (NaCl ER water) on the surface of optical glass. First, the etching characteristic of NaCl ER water on the surface of optical glass was made clear by the comparative immersion experiments with NaCl ER water and NaOH solution. The results show that as for the etching effects on optical glass, NaCl ER water is same as the NaOH solution and becomes weak. Next, the influence of NaCl ER water on the surface shape, chemical composition and chemical bonding of the surface of optical glass was made clear, by the observation using the AFM image and the result of ESCA (Electron Spectroscopy for Chemical Analysis). The results indicated that NaCl ER water did not have any bad influence on the surface shape, chemical composition and chemical bonding of optical glass. Lastly, by the washing experiment, the efficiency of NaCl ER water in abrasives particulate removal is verified.

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In this paper we discuss the basic characteristics and performance of precision washing using ER water (electrolyzed reducing water) electrolyzed with Na₂SO₄ solution (Na₂SO₄ ER water). First, the structure and characteristics of the three-tank system used to produce electrolyzed water as well as how Na₂SO₄ ER water is produced by the system are described. Next, the relationship between the characteristic value of Na₂SO₄ ER water and the electrolytic current, and its difference from those for NaCl ER water and NaOH solution are investigated experimentally. Changes in the characteristic value of Na₂SO₄ ER water with time are also investigated in the same time. Finally, according to the results of washing the surface of precision parts with Na₂SO₄ ER water, C₉H₁₂ solution and pure water, the washing efficiency of Na₂SO₄ ER water is verified.

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This paper describes the elucidation about influence of dilute NaCl electrolytically water on the surface of oxygen-free copper material. First, by the immersing experiment, it clarified an etching performance to the oxygen-free copper surface of electrolytically oxidized water, electrolytically reduced water and HCl solution. At the same time, the relation between the specific value of electrolytically oxidized water and etching speed of the oxygen-free copper was clarified too. Next, it made the influence which electrolytically water and HCl solution give the shape of the oxygen-free copper surface using SEM and laser 3D image clear. Lastly, by Auger electron spectroscopy, electrolytically water made an influence over the chemical composition of the oxygen-free copper surface layer and so on clear. By above mentioned experiment reviewing, it got the conclusion that dilute NaCl electrolyzed water can be used for surface treatment of the removal of the oxide film and so on in the surface of the oxygen-free copper.

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In this paper we discuss the influence of electrolyzed oxidizing water (EO water) on the surface of Permalloy 45. First, we threw light on the etching efficiency of NaCl EO water and Na₂SO₄ EO water on the surface of Permalloy 45 bycomparing it with the etching efficiency of soaking in HCl solution and H₂SO₄ solution. The comparative study showed that as for the etching efficiency on Permalloy 45, NaCl EO water and Na₂SO₄ EO water was superior to HCl solution and H₂SO₄ solution. Also, EO water can process an etching equally to each composition elements of Permaooly 45 compared with chemicals. Next, by analyzing the surface, we made it clear that the influence which NaCl EO water and Na₂SO₄ EO water exerts on the chemical composition in the surface of Permalloy 45. The results showed that EO water does not have a bad influence on the chemical composition of Permalloy 45. By this study, we got the suggestion that EO water can be applied to the surface processing of Permalloy 45.

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This paper discusses the basic characteristics of electrolyzed oxidizing water of dilute Na₂SO₄ and the etching effects on the surface of metals. First, the structure and the characteristics of the electrolyzed oxidizing water producing system as well as how electrolyzed oxidizing water of dilute Na₂SO₄ is produced by it are described. The electrolyzed oxidizing water producing system used in this study is the one with three tanks. Next, the relation between the characteristic value of electrolyzed oxidizing water and the value of electrolyzed electrolytic-current is investigated experimentally. How the characteristic value of electrolyzed oxidizing water changes as time passes is also investigated in the same way. Lastly, using the result of the experiment on the etching of pure iron material, the oxygen-free copper material and the alloy of copper and nickel, this paper elucidates the characteristics of electrolyzed oxidized water of Na₂SO₄.

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This paper describes the elucidation about formation of passivity film on aluminum alloy surface with dilute NaCl electrolytically reduced water. First, the sample of aluminum alloy is immersed in the electrolytically reduced water, and passivity film(Al₂O₃) is formed on the surface of samples. Next, the chemical composition of passivity film, the relation between thickness of passivity layer and immersing temperature was clarified by using surface analysis of Auger and ESCA (Electron Spectroscopy for Chemical Analysis). Finally, the corrosion resistance of the passivity film by the saltwater immersing experiment was evaluated. As results of the study, following could be identified. (1) Passivity film can be formed to the aluminum alloy with electrolytically reduced water, and the thickness of passivity film as the immersing temperature rises. (2) The immersing condition influences micro shape and surface roughness of passivity film. (3) The crack is generated on passivity film, but if sealing is processed, the crack can be lost. (4) Corrosion resistance improves if passivity film is formed with electrolytically reduced water.

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In this paper we discuss influence of Dilute NaCl-electrolyzed reducing water (ER water) on the surface of high carbon steel. First, the characteristics of dilute NaCl ER water and pure water for the comparative experiment was described. Next, the high carbon steel test pieces reviewed about the surface change such as the corrosion by the immersion processing to dilute NaCl ER water and pure water. The results show that pure water corrodes to the high carbon steel surface but dilute NaCl ER water doesn't corrode. Also, when doing immersion to dilute NaCl ER water, the alien substance which contains sodium mainly occurs. Moreover, when dry with drying oven after processing an immersion with dilute ER water, alien substance occurs much, but with the centrifuge, the occurrence of alien substance can reduce. The study indicates that dilute NaCl ER water can be applied to the surface treatment and washing of high carbon steel.

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In this paper, it is described that it makes the basic characteristics of electrolyzed water of dilute NaCl clear. First, the structure and the characteristic of the equipment which makes electrolyzed water were described. At the same time, the way of making electrolyzed water of dilute NaCl were described. The equipment of the electrolyzed water for this study is the type which has 3 bathtubs. Next, as for the relation between the electrolytic-current and the characteristics of electrolyzed water, it made clear experimentally. In the same way, it made the change of the characteristics of electrolyzed water by the elapse in the time clear. Also, it measured about the dissolution hydrogen concentration and the hydrogen grade scale in electrolytically reduced water, and the dissolution oxygen concentration in electrolytically oxidized water, too. Lastly, using the etching experimental results to the oxygen-free copper material, it proved the characteristics of electrolytically oxidized water.

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This paper describes the influence of NaCl EO water (electrolyzed oxidizing water) on the surface of Permalloy 78. First, the etching efficiency of NaCl EO water on the surface of Permalloy 78 was made clear by comparing it with the etching efficiency of soaking in HCl solution. The comparative study showed that as for the etching efficiency on the surface of Permalloy 78, NaCl EO water was superior to HCl solution. Also, NaCl EO water can process an etching equally to each composition elements of Permalloy 78 compared with HCl solution. Next, by analyzing the surface, the influence which NaCl EO water exerts on the chemical composition in the surface of Permalloy 78 was made clear. The results showed that NaCl EO water does not have any bad influences on the chemical composition of Permalloy 78. By this study, we got the suggestion that NaCl EO water can be applied to the surface processing of Permalloy 78.

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This paper describes the influence of electrolytic water dilute NaCl on the surface of Fe-42wt% Ni alloy (it is abbreviated to alloy 42 hereafter). First, we clarified the etching characteristic of electrolytically-oxidized water and electrolytically-reduced water against alloy 42 by the immersing experiments. What becomes clear is that electrolyticallyoxidized water has twice as big etching ability as HCl solution and that there is no etching operation in electrolyticallyreduced water. Next, we clarified two things by the surface analysis of the test pieces. One is that both electrolytically-reduced water and electrolytically-oxidized water are able to improve the cleanliness of the surface of the alloy 42. The other is that the oxide film layer can become thick by immersion into the electrolytically-oxidized water. The study indicates that electrolytic water can be applied to washing process of alloy 42 surface.

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This paper describes how to removal residual of metal ion which is in the semiconductor device using electrolytically oxidized water. First, it evaluated about the influence of the electrolytically oxidized water on the epoxy-radical board which is the substrate material of the semiconductor device. Next, as for the copper plating surface on the epoxy-radical material and the oxygen-free copper board, it experimented on the etching using electrolytically oxidized water and hydrochloric acid solution. Moreover, it did experimental reviewing about the relation between the specific of electrolytically oxidized water and the etching speed of copper plating. As results of the study, following could be identified. (1) Dilute NaCl electrolytically water doesn't have a bad influence on the surface of epoxy-radical material like hydrochloric acid solution. (2) Electrolytically oxidized water has the etching ability which is higher than hydrochloric acid solution to copper plating surface. (3) The etching speed of electrolytically oxidized water depends on the specific value. The bigger the value of ORP/pH is, the bigger the etching speed becomes. (4) The etching speed of electroplating is big compared with electroless plating.

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