Abstract
We investigated a calibration method of a parallel mechanism stage which is installed under a microscope. Our proposed method uses measurement data of the 2-DOF translations on the surface (x-y plane) of the end-effector and the rotation about the axis (z) perpendicular to the surface, and these measurement data are obtained by the measurement method with a micro grid pattern. We discuss the calibration method with simulations and experiments for a stage comprised of a fixed linear actuated parallel mechanism. The results show that the calibration which restricts measurement data to those 3-DOF of the end-effector is possible and has good performance.
