Development of magnetically driven micro valve using SU-8/Fe composite

Abstract

　In this study, we propose a magnetically driven micro valve made of magnetic composite with thick negative photoresist SU-8 and magnetic particles. It is able to fabricate a magnetically driven element using simple processing method based on micromachining technology by magnetic composite. To evaluate performance of the proposed microvalve, driving test under the external magnetic field was carried out. A prototype of the microvalve has the flow rate reduction rate of about 60%, and pressure resistance of 9 kPa.