The Proceedings of Conference of Tohoku Branch
Online ISSN : 2424-2713
2012.47
Session ID : 150
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150 On-line monitoring of residual stress during thin-film processing of transistors
Hironori Tago, Kota Nakahira, Ken Suzuki, Hideo Miura
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Keywords: Reliability, Residual Stress, Strain Sensor, Piezo Resistace Effect, Thin Films
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© 2012 The Japan Society of Mechanical Engineers
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