Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
High-rate Magnetron RF Sputtering of Tantalum
Shiro FUKUSHIMA, Naokichi HOSOKAWA, Takayuki MIZUTA
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1981 Volume 24 Issue 4 Pages 240-242

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