Fabrication of micro lens array by staining methood

Abstract

We propose a new method for fabrication of microlens arrays in which stain dots of a size 90-200 m in diameter are arrayed with 150-300m pitch on soda-lime or borosilicate glass substrates and then the substrates are heat-treated. Interference patterns were observed by a He-Ne laser radiation showing that the refractive index was modified corresponding to the arrayed dots and suggesting that the microlens arrays were formed.