Development of Nanometric Lateral Scales (3rd report)

Abstract

In the first report, National Metrology Institute of Japan (NMIJ), AIST developed nanometric lateral scales (pitch: 100 nm and 60 nm), measured pitches of the developed scales using an atomic force microscope with differential laser interferometers (DLI-AFM) and evaluated uncertainty in pitch measurements. In this report, a round robin test of the nanometric lateral scales among a deep-ultraviolet (DUV) laser diffractometer, a critical dimension scanning electron microscope (CD-SEM) and different types of atomic force microscope (AFM) was operated. The reference value and its expanded uncertainty were given by NMIJ. The consistency of the measurement results obtained by almost participants was satisfied. It was checked that the nanometric lateral scales were able to be applied to several types of nanometrological instruments.