Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
New Advanced Cu Deposition Process with Long Throw Sputtering
Kazuo TAKAKUWA
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Keywords: LTS (Long Throw Sputtering), Cu Wiring, Hole and Groove Filling
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1998 Volume 49 Issue 11 Pages 1185-1191

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Journal of the Metal Finishing Society of Japan

Genba Panfuretto

Jitsumu Hyomen Gijutsu

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