On-chip waveform capture exhibits the resolution of 10ps and 200μV with 1024 steps, and SFDR of 63.2dB in 700-MHz signal bandwidth of interest. On-chip signal probing as well as digital waveform processing are merged in systems-on-a-chip (SoC) integration. An exciter is combined for on-chip derivation of LCR parasitics from oscillatory waveforms of a power delivery network that are effectively seen by SoC circuits.