Surface analysis of glass and ionic liquids using high-resolution Rutherford backscattering spectroscopy

Abstract

High-resolution Rutherford backscattering spectroscopy (HR-RBS) is a powerful tool for non-destructive compositional depth profiling of nanometer-scale thin-film samples. It enables composition quantification with sub-nanometer depth resolution. Here, the analysis of insulating glass and ionic liquid solutions of alkali metal salts is presented, to demonstrate the performance of HR-RBS on various sample types.