Signal Detection in a SEM with the Magnetic/Electrostatic Compound Lens System

Abstract

State-of-art SEM allows detection of various SE and BSE signals. These signals can be recorded simultaneously with single scan. As the variety in signal detection increases, the image interpretation becomes more important and difficult. Signal detection in a SEM is complicated; it depends not only on the detector geometry and collection efficiency but also on other factors such as geometry of devices in chamber and the electron optical design. In this report, I will overview the principle of SE and BSE image formation in a SEM with the magnetic/electrostatic compound lens system.