Published: April 30, 2020Received: December 26, 2019Available on J-STAGE: May 09, 2020Accepted: February 06, 2020
Advance online publication: -
Revised: -
A multiple ion species Plasma FIB is now available which provides easy switching between Xe+, Ar+, O+ and N+ ions. We introduce plasma ion beam technology and compare it with conventional Ga+ FIB.