Observation of Laser Drilled Micro Hole Shapes Using The Replica Method

Abstract

The usefulness was examined of the replica method for observing the shapes of long drill holes several microns in diameter. The results closely agreed with the results of conventional sectional observation. Replicas of multiple drill holes in the same sample can be taken at the same time without the need for specialized techniques, with the process requiring only 10-20 minutes. A laser scanning microscope gives a clear 3D image of the replica. The replica method is thus suitable for the observation and evaluation of long drill holes several microns in diameter.