Journal of the Mass Spectrometry Society of Japan
Online ISSN : 1880-4225
Print ISSN : 1340-8097
ISSN-L : 1340-8097
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A Compact Primary Gun for Molecular SIMS
Itsuo KatakuseToshio IchiharaHiromitsu NakabushiTakekiyo MatsuoHisashi Matsuda
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1983 Volume 31 Issue 2 Pages 111-114

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Abstract
A compact primary gun of cold cathode discharge type for molecular SIMS is described. The size of the gun is 15 mm diameter and 31 mm long and 5 - 10 μA primary ion current was obtained. It could be mounted to a conventional FD source without any machine work of vaccum chamber.
Some SIMS spectra obtained with the gun up to m/z = 7000 are shown.
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© 1983 by The Mass Spectrometry Society of Japan
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