Abstract
In present days, when a surface profile is measured using an interferometer, it is necessary to use a reference. Therefore, the accuracy of an interferometer depends on the accuracy of a reference. In this article, we propose a new interferometer which accuracy dose not depend on the accuracy of a reference. This interferometer measures a profile using two steps. At the first step, the interferometer obtains the informations concerning the reference and a polarized beam splitter(PBS). At the second step, the interferometer obtains the informations mentioned above and the test surface. Then, the difference between them generates the profile of the test surface. A test mirror is measured and the experimental results shows the usefulness of this method.
