Abstract
In the field of positioning control, positioning control with air pressure actuators is proposed instead of with magnetic actuators. In our previous presentation whose title is high speed positioning for pneumatic system, intended tuning parameter and high speed positioning are shown. However, repeatability cannot be conformed due to flow and mechanical disturbances. Therefore, this paper presents the compensator method of flow disturbance named flow disturbance observer and PDD2 control with flow disturbance to improve the response of target value. The repeatability of PDD2 control with flow disturbance is also presented.