The 76th JSAP Autumn Meeting 2015
Session ID : 13a-1D-1
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 76
Location : [in Japanese]
Date : September 13, 2015 - September 16, 2015
Wafer bonding method for group III nitride semiconductors
*Ryoji Shinoda, Yousuke Katsu, Norikatsu Koide, Motoaki Iwaya, Satoshi Kamiyama, Tetsuya Takeuchi, Isamu Akasaki
Author information
Keywords:
13a-1D-1,
Wafer Bonding
Details
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