The 77th JSAP Autumn Meeting 2016
Session ID : 16a-P4-5
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 77
Location : [in Japanese]
Date : September 13, 2016 - September 16, 2016
The strain dependence of thermal oxidation and hydrogen annealing effect at Si/SiO2 (001) interface in V-MOSFET
*Shingo Kawachi, Shirakawa Hiroki, Araidai Masaaki, Kageshima Hiroyuki, Endoh Tetsuo, Shiraishi Kenji
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