Journal of The Adhesion Society of Japan
Online ISSN : 2187-4816
Print ISSN : 0916-4812
ISSN-L : 0916-4812
Technical Report
AdhesionofArFExcimerResistPatternDependingonHeatingTemperatureAnalyzedbyAtomicForceMicroscope
Akira KAWAI
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2003 Volume 39 Issue 11 Pages 423-425

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Abstract
Byusingtheatomicforcemicroscope(AFM),theadhesionpropertyofthemicroorganicpatternof177nmdiameter,whichisfabricatedbyArFexcimerlaserlithography,canbeanalyzedquantitatively.Intherangingofheatingtemperaturefrom100to200℃,thepeelingstrengthofresistpatternincreaseswiththeincreaseofheatingtemperature.Particularly,theadhesionpropertyisimprovedclearlyabove150℃.Thistechniquewillgiveusefulinformationforadhesiondesigningofmicrostructuresystem.
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© 2003 The Adhesion Society of Japan
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