Journal of The Adhesion Society of Japan
Online ISSN : 2187-4816
Print ISSN : 0916-4812
ISSN-L : 0916-4812
Short Communication
EffectofThermalStressonPeelPropertyofLineResistPatternAnalyzedbyAtomicForceMicroscope(AFM
Akira KAWAI, Daisuke INOUE
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2003 Volume 39 Issue 3 Pages 107-110

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Abstract
Theimprovementofadhesionpropertyofmicroresistpatternhasbeenrecognizedasoneimportantprobleminnano-devicefabrication.Bytheheattreatment,thethermalstressconcentratesatavicinityoflineedgeofresistpattern.Bythedirectpeelingmethodwithatomicforcemicroscope(AFM),itisclarifiedthatthepatternpeelismorelikelytooccuratthepatternedge.Bycombiningwithstressanalysis,thecloserelationshipbetweenthermalstressconcentrationandpeelingpropertyisconfirmed
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© 2003 The Adhesion Society of Japan
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