Abstract
Ultra-low-angle microtomy has been investigated as a preparation method for the compositional analysis of thin intermediate layers in the multilayer films. In this method, target layer is sectioned by a sharp knife with keeping a low angle from the surface. The exposed face has sufficiently large area to be analyzed by TOF-SIMS, XPS or micro FT-IR. It has been demonstrated that surface freezing and staining were useful for ultra-low-angle sectioning of soft samples with Tglower than room temperature.
