Journal of The Adhesion Society of Japan
Online ISSN : 2187-4816
Print ISSN : 0916-4812
ISSN-L : 0916-4812
Review
Optical Thin Films with Simultaneous Deposition Process of VacuumEvaporation and Sputtering
Hiroshi MUROTANI
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Keywords: SiO2 optical thin film, lower refractive index, sputtering, vacuum evaporation, combination deposition, stronger adhesion
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2019 Volume 55 Issue 11 Pages 414-420

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