2024 Volume 60 Issue 4 Pages 89-96
In this study, micro-patterning on zinc oxide（ZnO）thin film was carried out by laser writing lithography using a blue-violet laser with a wavelength of 405 nm. Here, introducing polypyrrole（PPy）thin film（thickness of about 60～70 nm）, as a visible-light sensitive layer, under the ZnO layer, concave micro-patterns with a line width of about 1 μm on the ZnO surface were successfully formed. In addition, the laser irradiation improved the crystallinity of the ZnO phase and enhanced UV emission（370～390nm）derived from its band-edge transitions and visible-light emission（500～540nm）attributed to defect levels. Strong adhesion between the ZnO layer and the substrate was also observed after the laser scribing. The micro-structures on the ZnO surface were imprinted on surface of polydimethylsiloxane（PDMS）．
