Removal of Micrometer-sized Particles on a Solid Wall by High-speed Impinging Air Jet

Abstract

In this study, a cleaning device to remove micron-sized particles on a solid surface device has a special nozzle containing a triangular cavity to add high intensity turbuimpinges on the solid surface removing the particles. Assuming the removal of a spheriwe performed numerical simulation of the flow field in the cleaning device and estimatdrag force from the numerical results. As the results of the numerical analysis for modified nothe minimization of slit length reduced pressure loss in the slit and increased the velenhanced the removal moment and improved removal performance.