Proceedings of Annual / Fall Meetings of Atomic Energy Society of Japan
2003 Fall Meeting
Session ID : B02
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Nanocrystalization process of Ge implanted into SiO2 and observation of surface
*MITSUHARU IKEDA, SATOSHI KONDO, MAKOTO IMAI, NOBUTSUGU IMANISHI
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[in Japanese]
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© 2003 Atomic Energy Society of Japan
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