Proceedings of Annual / Fall Meetings of Atomic Energy Society of Japan
2010 Fall Meeting
Session ID : I52
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High energy APF-IH linac for heavy ion inplantation
*yoshiki shimaya, toshiyuki hattori, noriyosu hayashizaki, liang lu, masaki takamura
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Keywords: heavy ion inplanter, semiconductor, APF-IH linac
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[in Japanese]
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© 2010 Atomic Energy Society of Japan
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