Proceedings of Annual / Fall Meetings of Atomic Energy Society of Japan
2011 Fall Meeting
Session ID : I20
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Construction of compact system to form 300 kV gaseous ion nanobeam
*Takeru Ohkubo, Yasuyuki Ishii, Tomihiro Kamiya
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Keywords: ion beam, nanobeam, acceleration lens, gaseous ion, beam writing
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[in Japanese]
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© 2011 Atomic Energy Society of Japan
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