Proceedings of Annual / Fall Meetings of Atomic Energy Society of Japan
2012 Fall Meeting
Session ID : K30
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Host: Atomic Energy Society of Japan

Focusing of gaseous ion beam via 300 kV compact acceleration lens system
*Takeru Ohkubo, Yasuyuki Ishii, Tomihiro Kamiya
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Keywords: ion beam, nanobeam, acceleration lens, gaseous ion, proton lithography
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[in Japanese]
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© 2012 Atomic Energy Society of Japan
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