Proceedings of Annual / Fall Meetings of Atomic Energy Society of Japan
2013 Annual Meeting
Session ID : J06
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Host: Atomic Energy Society of Japan

Focused gaseous ion beam with continuously variable energy using 300 kV compact acceleration lens system
*Takeru Ohkubo, Yasuyuki Ishii, Tomihiro Kamiya
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Keywords: ion beam, nano beam, acceleration lens, proton lithography, variable energy
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[in Japanese]
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© 2013 Atomic Energy Society of Japan
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