Abstract
Recently, the miniature fuel cells emerged as a promising power source for applications such as cellular phones, small digital devices, and autonomous sensors to embedded monitors or to micro-electro mechanical system (MEMS) devices. We designed micro-fuel processor system, which consists of a micro-reformer and fuel cell. Micro-fuel processor system generates H2 rich gas from NaBH4 solution. In our experiment, we have integrated micro-fuel processor system using low temperature co-fired ceramics (LTCC) process because LTCC is superior to other materials principally due to its high thermal and chemical stability, simpler fabrication processes, and lower materials cost. Therefore, we have studied and integrated micro-fuel processor system containing embedded heaters, cavities, membrane-electrode-assemblies (MEA), and 3D structures of micro-channel with LTCC. We developed the monolithic fuel cell system using LTCC process. Also we optimized the LTCC process.