Abstract
Carbonate containing hydroxyapatite (CHAp) thin films and magnesium containing hydroxyapatite (Mg-HA)
thin films were prepared using rf-magnetron sputtering method. The CHAp films were coated onto a titanium
(Ti) and a silicone (Si) substrate from a hydroxyapatite (HA) powder target, which were undertaken in a
mixed CO2 /Ar gas. The ratio of the CO2 gas to the Ar gas was varied in the ratio of 0:10, 2:8, 4:6, 6:4 and 8:2.
The Mg-HA films were coated onto a Ti substrate and a filter paper from a mixed HA/MgO powder target,
which were undertaken in an Ar gas. The molar ratio of Mg to Ca in the mixture target was varied in the
ratio of 0:10, 2:8, 4:6, 6:4 and 8:2. The chemical compositions of the CHAp films and the Mg-HA films sputtered
Ti substrates were determined by X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD). In
addition, the CHAp films sputtered Si substrates were analyzed by fourier transform infrared spectroscopy
(FT-IR). The Mg-HA films sputtered filter papers were heated at 700℃ to remove the filter paper and obtained
Mg-HA powders. The crystal lattice parameters from XRD patterns of Mg-HA powders were calculated.
The chemical analysis by XPS showed that only a surface of the CHAp films contained carbonate, and Mg-HA
films contained Mg. The XRD patterns of the Mg-HA films showed that the peak positions of HA was shifted
to higher angles because of Mg substitution for Ca in the HA structure. The XRD patterns showed that the
Mg-HA powders were composed of HA, beta-tricalcium phosphate (β-TCP) and MgO. The lattice parameter of
the identified β-TCP in the Mg-HA powders (Mg:Ca=2:8, 4:6 and 6:4) were smaller than that in the HA powder
(Mg:Ca=0:10).
