Abstract
We developed an infrared microscope, which attains a spatial super-resolution exceeding the diffraction-limited resolution. This microscope is based on a scanning microscope with the principle of total internal reflection of high refractive-index prism. We combined this microscope with an FT-IR spectrometer and applied it to infrared micro-spectroscopy. We describe the principle of this microscope and show the experimental results of the developed microscope.
