2006 Volume 55 Issue 10 Pages 749-755
A new three-electrode hollow cathode glow discharge lamp and a measuring technique were developed so that the sputtering process and emission process can be separated individually. The modulation technique was applied to the processes for creating a hollow cathode plasma as well as sputtering a sample. To detect specific emission lines of sample atoms from the overall signals, we used a Fast Fourier Transfer (FFT) spectrum analyzer. We could determine the bias voltages under the optimum discharge conditions for measuring the emission signal of the sample selectively by reading the component of the sputtering frequency in the FFT power spectrum. A three-electrode hollow cathode glow discharge lamp with an FFT spectrum analyzer is a promising analytical method for microanalysis.
