Fundamental Study on Quantitative Full Field XRF Imaging with X-ray CCD Camera

Abstract

A full-field energy-dispersive X-ray imaging apparatus (FF-EDXRF) using a photon-counting technique was produced, and its performance was confirmed. The energy resolution and the spatial resolution at 2 bin for Fe K_α were 142 eV and 52 μm, which results were comparable to the energy-dispersive X-ray detector and micro-XRF imaging apparatus, respectively. X-ray fluorescence images of multi elements were obtained at the same time for a print circuit board sample. However, the quantification of XRF imaging measured by FF-EDXRF has not been established. The application of a unified calibration curve for all pixels, which was estimated by Ni standard materials (FXS 326 – 331) and evaluated by the R² value, has permitted these quantitative XRF measurements. The accuracy of the calibration curve and the R² value was satisfied, and one calibration curve created by summarizing all of the calibration curve are applied for all effective pixels.