Abstract
A primary X-ray analyzer with a flat crystal vacuum X-ray spectroscope, for generating characteristic X-rays on the surface of specimen by electron beam of 28mmφ and for analyzing mean concentration of the desired element, has been developed. Details of this instrument and some of its applications to qualitative and quantitative analysis of solid materials are presented. The measurements of spectra such as B-Kα, C-Kα, N-Kα, O-Kα etc. prove that the electron excitation is effective in the region of soft X-rays or light element analysis, and optimum excitation voltage for light elements is so low as 10 kV for O-Kα. The analytical curve of silicon low alloy steels has a good linearity, and shows that the minimum detectable limit of silicon will be 0.003% for one minute counting time, or it is able to determine the concentration of silicon with the precision of 0.001 per cent or less as standard deviation. The qualitative analysis of glass and low alloy steels are carried out.
