Effect of organic solvent on the inductively coupled plasma impedance

Abstract

Effects of ethanol on the spectral emission intensities and impedance of an inductively coupled plasma were estimated. The reflected plasma resistances were computed from each value of circuit components of a matching network. The results showed that the plasma resistance increased and accordingly the reflected resistance decreased with increase of the ethanol concentration or with decrease of the RF power. The effect of ethanol on the plasma resistance became smaller as the RF power was increased. Difficulty in tuning the matching network by the introduction of organic solvent is explained by the fact that the slope of a tuning curve becomes steeper than that for the aqueous samples. A suitable tuning procedure for samples dissolved in organic solvents proposed.