Measurement conditions for the quantitative analysis of cobalt-nickel alloys with Auger electron spectroscopy

Abstract

The measurement conditions have been studied for the international projects on the improvements of the quantitative Auger electron spectroscopy using Co-Ni alloys as standard reference test specimens. The measurements of Auger electron intensity were carried out with a PHI 660 Microscopy. The curve fitting method was applied to the calculation of the composition of alloys. The specimens were sputtered by argon ion with 1 kV of accelerating voltage. The primary electron beam energy was 5 kV; and beam current was 1μA. The focus point of the analyzer was determined as the maximum point of the elastic peak intensity of electron beam. The specimens were accurately placed at the focus point of CMA. Under these measurement conditions, errors of quantitative analysis were within 4%.