Evaluation of bio-inspired algorithms for the automatic modeling system of the reaction mechanisms in chemical vapor deposition processes

Abstract

We developed an automatic modeling system of the reaction mechanisms in chemical vapor deposition processes by implementing the bio-inspired algorithms to the inference engine of the system. In addition, we evaluated the algorithms using both the median and the quartile deviation of the convergence values of the fitness function and calculation time. CMA-ES showed the best performance among the algorithms from the aspects of accuracy, convergence stability and calculation time.