Development of an automatic experimental design system based on multi-objective optimization methods for chemical vapor depositions

Abstract

In order to automate the research and development process for chemical vapor deposition (CVD) processes, we developed an automatic experimental design system. The system proposed the optimal experimental conditions using multi-objective optimization methods for identifying the reaction mechanism (reaction model) that indicates the reaction paths both in a gas-phase and on a surface from the reactant (source gas) to the product (film). In addition, the optimal experimental conditions as Pareto solutions were rearranged using a cluster analysis method.