Proceedings of JIEP Annual Meeting
The 17th JIEP Annual Meeting
Session ID : 12A-10
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Development of electroless cobalt alloys plating process for fabrication of ULSI barrier and capping layers
*Katashige MatsudaHidemi NawafuneAkamatsu Kensuke
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CONFERENCE PROCEEDINGS FREE ACCESS

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[in Japanese]

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© 2003 by The Japan Institute of Electronics Packaging
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