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e-Journal of Surface Science and Nanotechnology
Vol. 3 (2005) P 113-119

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http://doi.org/10.1380/ejssnt.2005.113

Conference -JRSSS6-

The methods of Differential Reflection Spectroscopy (DRS) and Atomic Force Microscopy (AFM) have been applied to study early stages of β-FeSi2 silicide formation. Some details on the Dynamic Standard method in DRS are presented. The imaginary part of the dielectric function of the β-FeSi2 film during its formation are calculated. [DOI: 10.1380/ejssnt.2005.113]

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