3A10 Molecular orientation of polyimide films exposed to ultraviolet light at an oblique angle

Abstract

We have investigated the molecular orientation of the polyimide film irradiated with p-polarized ultraviolet (UV) light at the incidence angle of 60°. The molecular orientation was determined from the incident angle dependence of the polarized infrared (IR) absorption spectra. The undecomposed polyimide molecules were, on average, inclined in the plane of incidence of the UV light. The inclination angle measured from the surface plane increased up to 〜10° with UV exposure.