Abstract
The scanning near-field imaging technique has been utilized in a variety of instruments that cover frequencies spanning the microwave-to-optical regions. Recently microwave and millimeter-wave bands scanning near-filed imaging techniques have attracted much attention as useful tools for evaluating dielectric, semiconductor, and metal materials, high special resolution thermography, topographic imaging, characterization of active microwave circuits, and so on. This talk provides an overview of high-frequency scanning near-field microscopy in the microwave and millimeter-wave regions. As an example of the millimeter-wave microscopy, a millimeter-wave microscope system using a metal slit-type probe is presented.
