Abstract
A microscope system with a composite optical device of a liquid crystal (LC) lens and an objective lens is developed for controlling the focal length without any mechanical movements. The LC lens has double circularly hole-patterned transparent electrodes with different diameters sandwiched between two external flat-transparent electrodes coated on the glass substrates. The focal length of the microscope system varies from about 17.0 mm to 29.0 mm when the voltages are applied to the double circularly hole-patterned electrodes and external flat electrode. The distribution of the depth profiles of a three-dimensional sample structure can be determined by adjusting the focal length of the LC lens without moving the sample stage or microscope positions.