Proceedings of the Fuzzy System Symposium
28th Fuzzy System Symposium
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Situation-Dependent Dispatching Rule Approach to Wafer Testing Process
Tsubasa MatsuoMasahiro InuiguchiKenihciro MasunagaDaisuke Hirota
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CONFERENCE PROCEEDINGS OPEN ACCESS

Pages 346-349

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Abstract
Scheduling of semiconducter wafer testing processes can be seen as a resource constraint project scheduling problem (RCPSP). However, it includes uncertainties caused by human factors, wafer errors and so on. Because some uncertainties are not simply quantitative, range estimation of the parameters would not be very useful. Considering such uncertainties, finding a good situation-dependent dispatching rule would be more suitable than solving the RCPSP under uncertainties. Moreover, the SDD rule would be advantageous in the adaptation to unexpected changes. In this paper we apply the Pitts approach to the situation-dependent dispatching rule acquisition. We compare the obtained rule with the simple dispatching rules and examine the effectiveness and usefulness of the obtained rule in the problems with unpredictable wafer errors.
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© 2012 Japan Society for Fuzzy Theory and Intelligent Informatics
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