Abstract
The reflectivity of multilayer neutron mirrors depends on the interface roughness. In order to smoothen the interfaces, we have investigated multilayer deposition techniques using ion beam sputtering (IBS) method. NiC/Ti multilayers were deposited as a function of carbon mixing ratio, and were characterized. It was confirmed that the nickel grain size was decreased by deposition of Ni3C compound and the reflectivity of supermirror with 2.4Qc was improved. Furthermore, ion polishing technique was developed in combination with IBS. The dependencies of ion polishing time, ionacceleration energy and incident angle were studied. It was observed that the reflectivities and the interface roughness are obviously improved using ion-polishing. We have constructed an IBS coating system with large deposition area for the mussproduction of high performance supermirrors and curved mirrors.
