Process of manufacture of polysilicon using hydrogen

Abstract

Polysilicon is a raw material of the semiconductor devices. It is converted to the single-crystal silicon and then the silicon wafer as a silicon substrate of LSI chip. Recently, the photovoltaic cell is paid to attention as the energy without generating carbon dioxide with the worldwide movement of the global environment protection. Polysilicon is also used as a raw material of the silicon type- photovoltaic cell.

High pure hydrogen is one of the key materials for production of Polysilicon. Then, in this text, the main process of manufacturing Polysilicon for the semiconductor and the situation of the attempt of low-cost Polysilicon production for the photovoltaic cell are reviewed with the matter of the high pure hydrogen as a reducing agent and dilution.