Development of sputtered neutrals mass spectrometer

Abstract

  A sputtered neutrals mass spectrometry (SNMS) system with a pulsed laser was developed to analyze neutral-molecules sputtered by ion beam for organic substance surface. The Laser-SNMS is a time-of-flight secondary ion mass spectrometer using 100kV ion irradiation system and Q-sw Nd:YAG laser. Preliminary experiments for phenol resin [-C₆H₄OHCH₂-]_n were performed with the Laser-SNMS system.