High-spatial resolution x-ray imaging microtomography

Abstract

  X-ray micro-tomography is a method for investigation of internal structures of materials, which shows a three-dimensional distribution of linear absorption coefficient, refractive index^1,2), elements³⁾ and some other properties of materials. At SPring-8, we have been developed an x-ray micro-tomography system combined with an x-ray imaging microscope optics for high-spatial resolution three-dimensional imaging. The system consists of an x-ray source with high-flux and high-directivity, a condenser system, an x-ray objective, an x-ray image detector based with CCD camera, and high precision stages. Three-dimensional imaging with a spatial resolution of better than 300 nm is available with this system.