2010 Volume 36 Issue 4 Pages 205-208
High spatial resolution X-ray detector is a key technology for X-ray micro-imaging. In SPring-8, visible light conversion type (CCD-based) detector is used because of its wide dynamic range and low-noise. The detectors consist of a thin fluorescent (Gd2O2S:Tb or Lu2SiO5:Ce) screen, visible light optics and CCD camera. A spatial resolution of 1μm was obtained from its point spread function with high resolution system. Some applications in X-ray micro-imaging are shown.